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  • 产品名称：ted pella超平硅片21610-4

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简单介绍：
Ø4" Ultra-Flat Silicon Wafer, Type <100>
详情介绍：

6" Silicon Wafer
Ultra-Flat 4" Silicon Wafer

Ultra-Flat 4" Silicon Wafers

Ultra-Flat 4" Silicon Wafer for demanding substrate studies. Can also be used as substrate for AFM or SEM samples by dicing the wafer into smaller pieces using a Scriber and the Wafer Cleaving / Glass Breaking Pliers. The 4" ultra-flat silicon wafer is shipped in a  4" wafer carrier.

Properties for 4" (100mm) Ultra-Flat Wafer:

  • Orientation: <100>
  • Type/Dopant: P/Boron
  • Grade: Prime / CZ Virgin
  • Resistivity: 10-20 Ohm-cm
  • Thickness: 525µm +/- 20µm
  • TTV: <4.00µm
  • SFPD: <2.0µm
  • Warp: ≤30µm
  • Bow: ≤20µm
  • Particles: ≤20@≥0.3µm
  • Front Surface: Polished
  • Back Surface: Etched
  • Flat: 2 per SEMI Standard
  • Site Flatness: <2.0µm
  • Roughness: Typically 2-3Å
Prod # Description Unit
21610-4 Ø4" Ultra-Flat Silicon Wafer, Type <100> each

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