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  • 产品名称：ted pella硅片21610-55

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简单介绍：
5 x 5mm stealth-diced Ultra-Flat Wafer, Type <100>, in a Gel-Pak® box
详情介绍：
6" Silicon Wafer
Ultra-Flat 6" Silicon Wafer

5 x 5mm SiO2 diced wafer
5 x 5mm, 5 x 7mm,
10 x 10mm stealth-diced
Ultra-Flat Wafers

Ultra-Flat 6" Silicon Wafers

Ultra-Flat 6" diameter Silicon Wafer for demanding substrate studies. The 6" ultra-flat silicon wafer is shipped in a 6" wafer carrier.

Also available as 5 x 5mm, 5 x 7mm, 10 x10mm stealth-diced dies in Gel-Pak® boxes. Stealth dicing eliminates edge-chipping and cutting debris associated with saw dicing, providing the cleanest, most uniform product possible. All products are packed in class 10 clean room conditions.

Properties for 6" (150mm) Ultra-Flat Wafer:

  • Material: CZ Virgin Silicon Wafer
  • Grade: Prime
  • Diameter: 150mm
  • Orientation: <100>
  • Type/Dopant: P/Boron
  • Resistivity: 10-20 ohm-cm
  • Thickness: 675µm +/- 20µm
  • TTV: ≤2µm
  • Site Flatness: <=1µm
  • Warp: ≤30µm
  • Bow: ≤20µm
  • Particles: ≤30@≥0.2µm
  • Front Surface: Polished
  • Back Surface: Etched
  • Flat: 1 per SEMI Standard
Prod # Description Unit
21610-6 Ø6" Ultra-Flat Silicon Wafer, Type <100> each
21610-55 5 x 5mm stealth-diced Ultra-Flat Wafer, Type <100>, in a Gel-Pak® box box/25
21610-57 5 x 7mm stealth-diced Ultra-Flat Wafer, Type <100>, in a Gel-Pak® box box/18
21610-510 10 x 10mm stealth-diced Ultra-Flat Wafer, Type <100>, in a Gel-Pak® box box/6
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