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  • 产品名称：EMS硅晶圆71893-02

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  • 产品厂商：美国EMS
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详情介绍：

These ultra-flat wafers can be used for substrate studies or as substrate for AFM and SEM samples by cleaving the wafer.

Specifications

4" 6" 8"
Material: Silicon Silicon Silicon
Diameter: 100 mm 150 mm 200 mm
Orientation: <100> <100> <100>
Type/Dopant: P/Boron P/Boron P/Boron
Grade: Prime/CZ Virgin Prime/CZ Virgin Prime/CZ Virgin
Growth Method: CZ CZ CZ
Resistivity: 10-20 Ohm-cm 10-20 Ohm-cm 10-20 Ohm-cm
Thickness: 525µm ±20µm 675µm ±20µm 725µm ±20µm
TTV: <4.00µm <4.00µm <4.00µm
SFPD: <2.0µm <2.0µm <2.0µm
Warp: ≤30µm ≤30µm ≤30µm
Bow: ≤30µm ≤30µm ≤30µm
Particles: ≤20@≥0.3µm ≤20@≥0.3µm ≤20@≥0.3µm
Front Surface: Polished Polished Polished
Back Surface: Etched Etched Etched
Flat: 2 per SEMI Standard 1 per SEMI Standard 2 per SEMI Standard
Site Flatness: <2.0µm <2.0µm <2.0µm
Roughness: Typically 2-3Å Typically 2-3Å Typically 2-3Å

Ordering

71893-01 Ultra-Flat Silicon Wafer, 4" each
71893-02 Ultra-Flat Silicon Wafer, 6" each
71893-03 Ultra-Flat Silicon Wafer, 8" each
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