MAG*I*CAL®透射电镜标样，是将分子束外延（MBE）生产的硅单晶用离子减薄方式制备成截面样品，单晶中是一系列原子平坦的Si和SiGe层，这些层的厚度和间距是已知的非常准确地数值，因为直接参考了硅的（111）晶格间距，这些晶格间距在样品上很容易看到。层间距设计使得该标样可以用于校准TEM的放大范围从大约1000X到1000000X，也可以用于执行相机常数校准和图像衍射图案旋转校准。
This standard is directly traceable to the crystal lattice constant of silicon and performs all major instrument calibrations for Transmission Electron Microscopy: • All TEM magnification ranges • Camera constant • Image/diffraction pattern rotation MAG*I*CAL consists of an electron transparent cross-sectional TEM sample made from a MBE grown, single-crystal semiconductor wafer. When the calibration structure is viewed in a TEM, it appears as a series of light and dark layers where the layer thicknesses are accurately known. The calibration thickness measurements of the light (silicon) and dark (SiGe alloy) layers are based on careful TEM measurements of the <1 1 1> lattice spacing of silicon, which is visible on the calibration sample itself and are supported by X-ray diffraction measurements. The layer spacings are designed so the sample can be used to calibrate the entire magnification range in TEM from 1,000X to 1,000,000X. As the sample is also a single crystal of silicon, the calibrations requiring electron diffraction information, such as the camera constant and image/diffraction pattern rotation, can also be performed easily and unambiguously. The MAG*I*CAL calibration sample is directly traceable to the lattice constant of silicon <1 1 1> (0.3135428nm). This constant can be measured directly on the MAGICAL sample, providing unbroken traceability to a fundamental constant of nature. One single calibration sample can be used to provide all three of the major TEM instrument calibrations at all magnifications and all cameras lengths.